3D nanoprinting via focused electron beams

Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant topic but still a highly challenging task. Among thepool of nanofabrication techniques, focused electron beam induced deposition (FEBID) has recently developed from a trial-and-errorlaboratory method to a predictable 3D nanoprinting technology with unique advantages. This perspective article first introduces the basicprinciples of 3D-FEBID, followed by an overview of historical developments with a particular emphasis on the last three years. Here, weexamine different aspects of 3D nanoprinting such as the instrumental setup, fundamental growth mechanisms, simulations, computeraided design software solutions, material properties, and application studies. For each aspect, the individual challenges and limitations arediscussed. In addition, we share our outlook about possible solutions and studies currently under investigation. As a perspective, we alsoaddress the most urgent milestones of the future and speculate on applications ranging from optics to mechanics, magnetics, and electronics,all of them benefiting from the recently improved 3D FEBID synthesis technique.