@article{c9bae612934548d2b028d2fca64f1a1d,
title = "Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings",
abstract = "The field of mid-infrared (MIR) plasmonics has shown great potential applications in spectroscopic sensing, infrared light sources and detectors. MIR plasmonic materials that are compatible with common fabrication processes may enable cost-effective and reliable plasmonic device platforms. In this work, we examined aluminium metal (Al), gold-tin (AuSn) and titaniumtungsten (TiW) alloys regarding their usability for surface plasmon polariton (SPP) excitation in the MIR regime using a grating configuration. The angle dependence and the influence of varying depths of gratings were numerically and experimentally studied for the chosen materials. The structures were fabricated on eight-inch silicon (Si) substrates and characterized with a free-beam reflection measurement setup in the MIR regime. The fabricated gratings show narrow resonance dips, which are in good agreement with the simulations, revealing that Al, AuSn and TiW alloys are reliable plasmonic materials for MIR plasmonic devices.",
author = "Jasmin Spettel and Gerald Stocker and Dao, {Thang Duy} and Reyhaneh Jannesari and Andreas Tortschanoff and Parviz Saeidi and Gerald P{\"U}hringer and Florian Dubois and Clement Fleury and Cristina Consani and Thomas Grille and Elmar Aschauer and Mohssen Moridi and Bernhard Jakoby",
note = "Funding Information: Acknowledgments. This work was performed within the PICASSO-project funded by the Bundesministerium f{\"u}r Klimaschutz, Umwelt, Energie, Mobilit{\"a}t, Innovation und Technologie (BMK) in the framework of the program {"}Produktion der Zukunft{"} (Prj. Nr. 871417). Furthermore, the authors want to thank the involved staff working at the cleanroom of Infineon Technologies Austria AG, Villach, for their kind support with the fabrication of the structures and T. Ostermann for the mask layouts. In addition, the authors would like to thank L. Makai and A. Ertl at Semilab for their kind support in spectroscopic ellipsometry measurement. Jasmin Spettel wants to thank P. Hadley (Graz University of Technology) for his kind advice and fruitful discussions. Funding Information: This work was performed within the PICASSO-project funded by the Bundesministerium f?r Klimaschutz, Umwelt, Energie, Mobilit?t, Innovation und Technologie (BMK) in the framework of the program {"}Produktion der Zukunft{"} (Prj. Nr. 871417). Furthermore, the authors want to thank the involved staff working at the cleanroom of Infineon Technologies Austria AG, Villach, for their kind support with the fabrication of the structures and T. Ostermann for the mask layouts. In addition, the authors would like to thank L. Makai and A. Ertl at Semilab for their kind support in spectroscopic ellipsometry measurement. Jasmin Spettel wants to thank P. Hadley (Graz University of Technology) for his kind advice and fruitful discussions. Publisher Copyright: {\textcopyright} 2021 Optical Society of America under the terms of theOSA Open Access Publishing Agreement",
year = "2021",
doi = "10.1364/OME.417877",
language = "English",
volume = "11",
pages = "1058--1069",
journal = "Optical Materials Express",
issn = "2159-3930",
publisher = "Optica Publishing Group",
number = "4",
}