@article{2b5875b86b9441828602aeccbe65fabd,
title = "Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements",
author = "Stefan Kirnst{\"o}tter and Martin Faccinelli and Moriz Jelinek and Werner Schustereder and Laven, {Johannes G.} and Hans-Joachim Schulze and Peter Hadley",
year = "2014",
doi = "DOI: 10.1002/pssc.201400050",
language = "English",
volume = "1",
pages = "1610--1642",
journal = "Physica Status Solidi (C) - Current Topics in Solid State Physics",
issn = "1610-1634",
publisher = "Wiley-VCH ",
}