Direct-on-barrier copper electroplating on ruthenium from the ionic liquid 1-ethyl-3-methylimidazolium dicyanamide

L. D'Urzo, Stijn Schaltin, Andrey Shkurankov, Harald Plank, Gerald Kothleitner, Koen Binnemans, Jan Fransaer

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	647-653
Fachzeitschrift	Journal of the Electrochemical Society
Jahrgang	158
Publikationsstatus	Veröffentlicht - 2011

Fields of Expertise

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title = "Direct-on-barrier copper electroplating on ruthenium from the ionic liquid 1-ethyl-3-methylimidazolium dicyanamide",

author = "L. D'Urzo and Stijn Schaltin and Andrey Shkurankov and Harald Plank and Gerald Kothleitner and Koen Binnemans and Jan Fransaer",

year = "2011",

language = "English",

volume = "158",

pages = "647--653",

journal = "Journal of the Electrochemical Society",

publisher = "Electrochemical Society, Inc.",

}

TY - JOUR

T1 - Direct-on-barrier copper electroplating on ruthenium from the ionic liquid 1-ethyl-3-methylimidazolium dicyanamide

AU - D'Urzo, L.

AU - Schaltin, Stijn

AU - Shkurankov, Andrey

AU - Plank, Harald

AU - Kothleitner, Gerald

AU - Binnemans, Koen

AU - Fransaer, Jan

PY - 2011

Y1 - 2011

M3 - Article

VL - 158

SP - 647

EP - 653

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

ER -