Expanding FEBID-Based 3D-Nanoprinting toward Closed High-Fidelity Nanoarchitectures

3D-nanoprinting via focused electron beam induceddeposition (FEBID) is a highly flexible additive-fabricationtechnique that has gained importance in the past few years forits variable design possibilities on the micro and nanoscale. In thiswork, we show the transition from mesh-like toward closed (sheetlike)structures and the development of necessary compensations(height correction, temperature compensation, and proximitycorrection) to minimize deviations between the target structureand the actual deposit. To accomplish this, we investigate thegrowth behavior, the influence of beam heating, and the electrontrajectories in extensive experimental series as well as finite-difference simulations. Out of this, we derive a modular Python tooltaking all compensations into account, enabling the controlled and accurate deposition of 3D-nanostructures in an individuallyadjusted layer-by-layer approach. This approach forms the basis for accurately fabricating closed, sheet-like objects on the nanoscaleand lays the foundation for depositing complex nanoarchitectures for various applications in research and development.