Expanding High-fidelity 3D-Nanoprinting - From Meshes toward Closed Structures

3D nanoprinting via Focused Electron Beam Induced Deposition 3 D FEBID is one of the few additive, direct write methods capable ofproducing real 3 D objects on the nanoscale With feature sizes below 100 nm on a regular basis and various possibilities in substrate andprecursor materials, it is a highly flexible technique with numerous potential applications 1 2 3 In the past, 3 D FEBID was mainly used forbuilding mesh like structures 4 This project focuses on the expansion towards closed structures, where additional growth affecting factors, suchas edge effects and more advanced temperature distributions apply (Fig 1 We approach the situation with a combination of experiments andsimulations to develop a compensation tool for arising challenges, which forms the basis of next generation 3 D nanoprinting via electrons 5