FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality

High-fidelity 3D printing of nanoscale objects is an increasing relevant but challengingtask. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) hasdemonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space anda very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducingthe substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3Ddeposits in a temperature range of 5–30 C. The findings reveal a volume growth rate boost up to afactor of 5.6, while the shape fidelity in 3D space is maintained. From a materials point of view, theinternal nanogranular composition is practically unaffected down to 10 C, followed by a slight grainsize increase for even lower temperatures. The study is complemented by a comprehensive discussionabout the growth mechanism for a more general picture. The combined findings demonstrate thatFEBID on low substrate temperatures is not only much faster, but practically free of drawbacksduring high fidelity 3D nanofabrication.