Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Georg Arnold; Rajendra Timislina; Jason Fowlkes; Angelina Orthacker; Gerald Kothleitner; Philip D. Rack; Harald Plank

doi:10.1021/am5008003

Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Georg Arnold, Rajendra Timislina, Jason Fowlkes, Angelina Orthacker, Gerald Kothleitner, Philip D. Rack, Harald Plank

Institut für Elektronenmikroskopie und Nanoanalytik (5190)

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	7380-7387
Fachzeitschrift	ACS Applied Materials & Interfaces
Ausgabenummer	6
DOIs	https://doi.org/10.1021/am5008003
Publikationsstatus	Veröffentlicht - 2014

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Zugriff auf Dokument

10.1021/am5008003

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → …
Projekt: Foschungsprojekt

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title = "Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis",

author = "Georg Arnold and Rajendra Timislina and Jason Fowlkes and Angelina Orthacker and Gerald Kothleitner and Rack, {Philip D.} and Harald Plank",

year = "2014",

doi = "10.1021/am5008003",

language = "English",

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journal = "ACS Applied Materials & Interfaces",

issn = "1944-8244",

publisher = "American Chemical Society",

number = "6",

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T1 - Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

AU - Arnold, Georg

AU - Timislina, Rajendra

AU - Fowlkes, Jason

AU - Orthacker, Angelina

AU - Kothleitner, Gerald

AU - Rack, Philip D.

AU - Plank, Harald

PY - 2014

Y1 - 2014

U2 - 10.1021/am5008003

DO - 10.1021/am5008003

M3 - Article

SN - 1944-8244

SP - 7380

EP - 7387

JO - ACS Applied Materials & Interfaces

JF - ACS Applied Materials & Interfaces

IS - 6

ER -

Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Fields of Expertise

Treatment code (Nähere Zuordnung)

Zugriff auf Dokument

Projekte

Functional Nanofabrication

Dieses zitieren