Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition

Taher Abu Ali; Julian Pilz; Philipp  Schäffner; Barbara Stadlober; Anna Maria Coclite

Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition

Taher Abu Ali, Julian Pilz, Philipp Schäffner, Barbara Stadlober, Anna Maria Coclite

Institut für Festkörperphysik (5130)

Publikation: Konferenzbeitrag › Poster

Abstract

Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 28 Sept. 2020

Dieses zitieren

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title = "Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition",

abstract = "Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.",

author = "{Abu Ali}, Taher and Julian Pilz and Philipp Sch{\"a}ffner and Barbara Stadlober and Coclite, {Anna Maria}",

year = "2020",

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T1 - Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition

AU - Abu Ali, Taher

AU - Pilz, Julian

AU - Schäffner, Philipp

AU - Stadlober, Barbara

AU - Coclite, Anna Maria

PY - 2020/9/28

Y1 - 2020/9/28

N2 - Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.

AB - Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.

M3 - Poster

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