Universal software for the real-time control of sequential processing techniques

Julian Pilz, Martin Tazreiter, Anna Maria Coclite

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Aufsatznummer	063201
Fachzeitschrift	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Jahrgang	37
Ausgabenummer	6
DOIs	https://doi.org/10.1116/1.5125052
Publikationsstatus	Veröffentlicht - 1 Nov. 2019

ASJC Scopus subject areas

@article{12f71ea59fcd4d21bca57897a5de553f,

title = "Universal software for the real-time control of sequential processing techniques",

author = "Julian Pilz and Martin Tazreiter and Coclite, {Anna Maria}",

year = "2019",

month = nov,

day = "1",

doi = "10.1116/1.5125052",

language = "English",

volume = "37",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "American Vacuum Society (AVS)",

number = "6",

}

TY - JOUR

T1 - Universal software for the real-time control of sequential processing techniques

AU - Pilz, Julian

AU - Tazreiter, Martin

AU - Coclite, Anna Maria

PY - 2019/11/1

Y1 - 2019/11/1

UR - http://www.scopus.com/inward/record.url?scp=85074095798&partnerID=8YFLogxK

U2 - 10.1116/1.5125052

DO - 10.1116/1.5125052

M3 - Article

AN - SCOPUS:85074095798

SN - 0734-2101

VL - 37

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

M1 - 063201

ER -