Deep X-ray Lithography: the instrument

Activity: Talk or presentation › Talk at workshop, seminar or course › Science to science

Period18 Apr 2017
Event titleAdvances in Small Angle X-Ray Scattering and Deep X-Ray Litography
Event typeWorkshop
LocationBuenos Aires, ArgentinaShow on map
Degree of RecognitionInternational

Keywords

  • DXRL
  • irradiation dose
  • microfabrication

Fields of Expertise

  • Advanced Materials Science