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Extreme ultraviolet metalens by vacuum guiding
Ossiander, M.
(Contributor)
Maryna Leonidivna Meretska (Contributor)
Hampel, H. K.
(Contributor)
Soon Wei Daniel Lim (Contributor)
Knefz, N.
(Contributor)
Jauk, T.
(Contributor)
Federico Capasso (Contributor)
Schultze, M.
(Speaker)
Institute of Experimental Physics (5110)
Activity
:
Talk or presentation
›
Invited talk at conference or symposium
›
Science to science
Period
26 May 2023
Event title
18th Fraunhofer IISB Lithography Simulation Workshop
Event type
Workshop
Conference number
18
Location
Behringersmühle, Germany
Show on map
Degree of Recognition
International
Fields of Expertise
Advanced Materials Science