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Initiated PECVD: a new strategy to enhance monomer structure retention
Coclite, A. M.
(Speaker)
Institute of Solid State Physics (5130)
Activity
:
Talk or presentation
›
Invited talk
›
Science to science
Period
20 May 2015
Event title
XXII Meeting of the Italian Vacuum Society : AIV
Event type
Conference
Location
Genua, Italy
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