Model-Based Temperature Control in Thermal Processing of Semiconductor Wafers
- Koch, S. (Speaker)
- Alexander Schaum (Contributor)
- Martin Kleindienst (Contributor)
- Reichhartinger, M. (Contributor)
- Thomas Meurer (Contributor)
- Jaime A. Moreno (Contributor)
- Horn, M. (Contributor)
Activity: Talk or presentation › Talk at conference or symposium › Science to science