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Study of the properties of Al:ZnO thin films grown by plasma-enhanced atomic layer deposition
Julian Pilz (Speaker)
Benjamin Sorgmann (Contributor)
Alberto Perrotta (Contributor)
Coclite, A. M.
(Contributor)
Institute of Solid State Physics (5130)
Activity
:
Talk or presentation
›
Talk at conference or symposium
›
Science to science
Period
11 Jun 2019
Event title
24th International Symposium on Plasma Chemistry
Event type
Conference
Location
Naples, Italy
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Fields of Expertise
Advanced Materials Science