Buchberger, A.,
Maierhofer, P.,
Kraft, J.,
Baumgart, M. &
Bergmann, A.,
1 Jan 2020,
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII. Panchapakesan, B., Attias, A-J. & Park, W. (eds.).
SPIE, 114672J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11467).
Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review