Analytical Characterization of Thin Layers and Interfaces Between Thin Layers in Semiconducting Materials Devices and Magnetic Multilayers by Means of EELS and EFTEM

Grogger, Werner (Principal Investigator (PI))
Hofer, Ferdinand (Co-Investigator (CoI))
Brunegger, Albert (Co-Investigator (CoI))
Warbichler, Peter (Co-Investigator (CoI))
Kothleitner, Gerald (Co-Investigator (CoI))

Institute of Electron Microscopy and Nanoanalysis (5190)

Project: Research area

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2003

Width determination of SiO2 films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness
Schaffer, B., Grogger, W. & Hofer, F., 2003, In: Micron. 34, p. 1-7
Research output: Contribution to journal › Article › peer-review