Characterization of nanocrystalline Ti-B-N und Ti-B-C coatings

Superhard nanocomposite coatings of the chemical composition Ti-B-N and Ti-B-C were deposited onto the surface of steel and molybdenum foils by means of magnetron sputtering. Cross-sections of the coatings were investigated in the analytical electron microscope. Electron-diffraction, EELS-spectrometry and detailed analysis of near edge fine structures were used to determine the chemical composition of the coatings. It was found that the coatings are mostly nanocrystalline and consist of different chemical phases depending on the preparation conditions.