Characterization of Niobium-Nitride Layers on SiO2 by Means of EELS and EFTEM

Brunegger, Albert (Co-Investigator (CoI))
Kothleitner, Gerald (Principal Investigator (PI))
Rogers, Michael (Co-Investigator (CoI))

Institute of Electron Microscopy and Nanoanalysis (5190)

Project: Research project

1 Conference paper

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Conference paper

Vergleich der Eigenschaften aufgedampfter und aufgesputterter Niob-Schichten auf Silicium- und Saphirwafern
Warbichler, P., Kolbesen, B., Brunkahl, O., Angelkort, C., Bock, W., Oechsner, H., Röll, K. & Thoma, K., 2003, 12. Tagung Festkörperanalytik, Wien, Kurzfassungen,. ., p. P19-P19
Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review