Project Details
Description
Several new semiconductor power electronics fabrication lines will be established in Europe. This project will examine the basic physics upon which these devices are based. As far as necessary for a fully functional pilot line also the evaluation and implementation of new equipment, materials and automation tools will be studied. This will particularly apply to material stacks in metallization layers and wafer backside.
| Status | Finished |
|---|---|
| Effective start/end date | 1/04/13 → 31/03/16 |
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