iWaCon - Modeling, simulation, process optimization and control for semiconductor manufacturing tools

Ever smaller and more complex three-dimensional structures and the use of new materials in modern microchips place the highest demands on their manufacturing processes. In order to meet these requirements, tight process control and ensuring process repeatability in the production of semiconductor products is essential. In many areas of LAM Research's production facilities, modern control technology methods are already used to control process parameters such as the pressure, volume flow and temperature of the process chemicals used. The aim of the research project is to improve existing and develop new control strategies to achieve the required process accuracies in current and future technology nodes.