Functionalized polysilanes and related compounds are ideal precursors for a variety of industrial processes, such as chemical vapor deposition (CVD) or atomic layer deposition (ALD). For this project previously unknown heteroelement substituted higher silicon hydrides which contain one or more heteroatoms covalently linked to silicon shall be synthesized. Moreover, we plan to adopt this chemistry for the corresponding germanium compounds. The resulting materials, shall then be applied as single source precursors. In order to examine the principle feasibility of the overall concept, we propose a project with a timeframe of 12 months.
|Effective start/end date||1/07/22 → 30/06/23|
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