Sub-Nanometer Analysis with HR-EFTEM and HR-STEM

The new generation of analytical high resolution electron microscopes enables sub-nanometer analysis of materials by two main approaches: First HR-EFTEM has matured into an important nanoanalytical technique in both materials and life sciences. This technique can be used to map the two dimensional distribution of most elements with nanometer resolution. Recent investigations and simulations have shown that sub-nanometer resolution should be possible in EFTEM elemental mapping. In this project we try to perform such experiments and compare the results with the second approach: HR-STEM imaging with a HAADF detector which is principally capable of imaging compositional variations with atomic resolution. The experiments will be compared with image simulations which will be performed in cooperation with theoretical groups.