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WetCleanSIM - Computational modeling for wet cleaning inside semiconductor nanostructures
Steiner, Helfried
(Co-Investigator (CoI))
Institute of Fluid Mechanics and Heat Transfer (3210)
Project
:
Research project
Overview
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
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Weight
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Engineering
Liquid Jet
100%
Structure Surface
100%
Semiconductor Nanostructures
100%
Thin Films
100%
Liquid Film
50%
Analytical Model
50%
Multiscale
50%
Diffusive Transport
50%
Channel Structure
50%
Transport Phenomena
50%
Carrier Liquid
50%
Central Region
50%
Diffusive
50%
Nanometre
50%
Axisymmetric
50%
Centrifugal Force
50%
Convective
50%
Silicon Substrate
50%
Molecular Scale
50%
Etching Process
50%
Surface Material
50%
Material Science
Surface Structure
100%
Nanostructure
100%
Thin Films
100%
Liquid Film
50%
Transport Phenomena
50%
Silicon
50%
Film
50%
Film Thickness
50%
Surface (Surface Science)
50%