25th Anniversary Article: CVD polymers: A new paradigm for surface modification and device fabrication

Anna Maria Coclite, Rachel M. Howden, David C. Borrelli, Christy D. Petruczok, Rong Yang, Jose Luis Yagüe, Asli Ugur, Nan Chen, Sunghwan Lee, Won Jun Jo, Andong Liu, Xiaoxue Wang, Karen K. Gleason*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review


Well-adhered, conformal, thin (<100 nm) coatings can easily be obtained by chemical vapor deposition (CVD) for a variety of technological applications. Room temperature modification with functional polymers can be achieved on virtually any substrate: organic, inorganic, rigid, flexible, planar, three-dimensional, dense, or porous. In CVD polymerization, the monomer(s) are delivered to the surface through the vapor phase and then undergo simultaneous polymerization and thin film formation. By eliminating the need to dissolve macromolecules, CVD enables insoluble polymers to be coated and prevents solvent damage to the substrate. CVD film growth proceeds from the substrate up, allowing for interfacial engineering, real-time monitoring, and thickness control. Initiated-CVD shows successful results in terms of rationally designed micro- and nanoengineered materials to control molecular interactions at material surfaces. The success of oxidative-CVD is mainly demonstrated for the deposition of organic conducting and semiconducting polymers. The deposition of functional polymers from the vapor phase enables new frontiers for device fabrication and technological development. Chemical vapor deposition (CVD) methods have a marked footprint in a wide range of applications from biotechnology to conducting polymers for solar cells. Finally, CVD process implementation to an industrial scale and commercialization are also discussed.

Original languageEnglish
Pages (from-to)5392-5423
Number of pages32
JournalAdvanced Materials
Issue number38
Publication statusPublished - 2013


  • chemical vapor deposition
  • conformality
  • conjugated polymers
  • functional polymers
  • surface modification

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Review

Cite this