3D Integration of MEMS and IC: Design, Technology and Simulations

Maaike Taklo, Kari Schjølberg-Henriksen, Nicolas Lietaer, Josef Prainsack, Anders Elfving, Josef Weber, Matthias Klein, Peter Schneider, Sven Reitz

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
PublisherSpringer Netherlands
Pages191-203
Volume3
Edition1
ISBN (Print)978-90-481-3805-0
DOIs
Publication statusPublished - 2010

Publication series

NameNATO Science for Peace and Security Series B: Physics and Biophysics
PublisherSpringer Netherlands

Treatment code (Nähere Zuordnung)

  • Application

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