A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films

Heinz-Georg Flesch; Oliver Werzer; Martin Weis; Jan Jakabovic; Jaroslav Kovac; Daniel Hasko; Georg Jakopic; Harry J Wondergem; Roland Resel

A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films

Heinz-Georg Flesch, Oliver Werzer, Martin Weis, Jan Jakabovic, Jaroslav Kovac, Daniel Hasko, Georg Jakopic, Harry J Wondergem, Roland Resel

Institute of Solid State Physics (5130)

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2008
Event	XTOP 2008 - Linz, Austria Duration: 15 Sept 2008 → 19 Sept 2008

Conference

Conference	XTOP 2008
City	Linz, Austria
Period	15/09/08 → 19/09/08

Treatment code (Nähere Zuordnung)

Experimental

Cite this

@conference{31ab3bfb0e7343e8a9de201738ac2690,

title = "A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films",

author = "Heinz-Georg Flesch and Oliver Werzer and Martin Weis and Jan Jakabovic and Jaroslav Kovac and Daniel Hasko and Georg Jakopic and Wondergem, {Harry J} and Roland Resel",

year = "2008",

language = "English",

note = "XTOP 2008 ; Conference date: 15-09-2008 Through 19-09-2008",

}

TY - CONF

T1 - A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films

AU - Flesch, Heinz-Georg

AU - Werzer, Oliver

AU - Weis, Martin

AU - Jakabovic, Jan

AU - Kovac, Jaroslav

AU - Hasko, Daniel

AU - Jakopic, Georg

AU - Wondergem, Harry J

AU - Resel, Roland

PY - 2008

Y1 - 2008

M3 - Poster

T2 - XTOP 2008

Y2 - 15 September 2008 through 19 September 2008

ER -