A Customizable Simulator for Artificial Intelligence Research to Schedule Semiconductor Fabs

Benjamin Kovacs, Pierre Tassel, Ramsha Ali, Mohammed El-Kholany, Martin Gebser, Georg Seidel

Research output: Chapter in Book/Report/Conference proceedingConference paperpeer-review

Abstract

Optimal scheduling of semiconductor fabs is a huge challenge due to the problem scale and complexity. New dispatching strategies are usually developed and tested using simulators of different fidelity levels. This work presents a scalable, open-source tool for simulating factories up to real-world size, aiming to support the research into new scheduling algorithms from prototyping to large-scale experiments. The simulator comes with a declarative environment definition framework and is out of the box usable with existing reinforcement learning methods, priority-based rules, or evolutionary algorithms. We verify our tool on large-scale public instances and provide proof-of-concept demonstrations of the reinforcement learning interface's usage.

Original languageEnglish
Title of host publication2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2022
PublisherInstitute of Electrical and Electronics Engineers
ISBN (Electronic)9781665494878
DOIs
Publication statusPublished - 2022
Event33rd Annual SEMI Advanced Semiconductor Manufacturing Conference: ASMC 2022 - Saratoga Springs, United States
Duration: 2 May 20225 May 2022

Publication series

NameASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
Volume2022-May
ISSN (Print)1078-8743

Conference

Conference33rd Annual SEMI Advanced Semiconductor Manufacturing Conference
Abbreviated titleASMC 2022
Country/TerritoryUnited States
CitySaratoga Springs
Period2/05/225/05/22

Keywords

  • benchmarking
  • gym environment
  • reinforcement learning
  • scheduling
  • semiconductor manufacturing
  • simulation

ASJC Scopus subject areas

  • Engineering(all)

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