A Variable Gas Injection System for Rapid Precursor Testing in Focused Electron Beam Induced Deposition

Robert Winkler, Georg Arnold, Jürgen Sattelkow, Andrew Smith, Harald Plank

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2018
Event	Tagung der Deutschen Physikalischen Gesellschaft e.V. - Berlin, Germany Duration: 11 Mar 2018 → 16 Mar 2018

Conference	Tagung der Deutschen Physikalischen Gesellschaft e.V.
Abbreviated title	DPG-Tagung
Country/Territory	Germany
City	Berlin
Period	11/03/18 → 16/03/18

ASJC Scopus subject areas

@conference{6885966e03d24d0d83be5e8ce387f95f,

title = "A Variable Gas Injection System for Rapid Precursor Testing in Focused Electron Beam Induced Deposition",

author = "Robert Winkler and Georg Arnold and J{\"u}rgen Sattelkow and Andrew Smith and Harald Plank",

year = "2018",

language = "English",

note = "Tagung der Deutschen Physikalischen Gesellschaft e.V., DPG-Tagung ; Conference date: 11-03-2018 Through 16-03-2018",

}