Alternative Pattering Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Multinational Congress on Microscopy
Publisher	.
Pages	131-132
Publication status	Published - 2011
Event	Multinational Congress on Microscopy - Graz, Austria Duration: 30 Aug 2009 → 4 Sept 2009

Conference	Multinational Congress on Microscopy
Country/Territory	Austria
City	Graz
Period	30/08/09 → 4/09/09

Fields of Expertise

@inproceedings{725898f61b384a9fb3e78999646bf5dd,

title = "Alternative Pattering Strategies for Reduced Thermal Stress during Focused Ion Beam Processing",

author = "Harald Plank and Roland Schmied and Evelin Fisslthaler and Chernev, {Boril Stefanov} and Claudia Mayrhofer",

year = "2011",

language = "English",

pages = "131--132",

booktitle = "Multinational Congress on Microscopy",

publisher = ".",

note = "Multinational Congress on Microscopy ; Conference date: 30-08-2009 Through 04-09-2009",

}

TY - GEN

T1 - Alternative Pattering Strategies for Reduced Thermal Stress during Focused Ion Beam Processing

AU - Plank, Harald

AU - Schmied, Roland

AU - Fisslthaler, Evelin

AU - Chernev, Boril Stefanov

AU - Mayrhofer, Claudia

PY - 2011

Y1 - 2011

M3 - Conference paper

SP - 131

EP - 132

BT - Multinational Congress on Microscopy

PB - .

T2 - Multinational Congress on Microscopy

Y2 - 30 August 2009 through 4 September 2009

ER -