An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps

Bernhard Geiger; Stefan Schrunner; Roman Kern

An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps

Bernhard Geiger, Stefan Schrunner, Roman Kern

Research output: Contribution to conference › Abstract › peer-review

Original language	English
Publication status	Published - Apr 2019
Event	European Advanced Process Control and Manufacturing Conference - Villach, Villach, Austria Duration: 8 Apr 2019 → 10 Apr 2019 http://www.apcm-europe.eu

Conference

Conference	European Advanced Process Control and Manufacturing Conference
Abbreviated title	apc\|m
Country/Territory	Austria
City	Villach
Period	8/04/19 → 10/04/19
Internet address	http://www.apcm-europe.eu

Access to Document

SlidesAccepted author manuscript, 1.82 MB
AbstractAccepted author manuscript, 284 KB

Cite this

@conference{ea494bf21ccc4901a6d132cc73bc76d1,

title = "An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps",

author = "Bernhard Geiger and Stefan Schrunner and Roman Kern",

note = "Schrunner und Geiger haben zu gleichen Anteilen zur Publikation beigetragen.; European Advanced Process Control and Manufacturing Conference, apc|m ; Conference date: 08-04-2019 Through 10-04-2019",

year = "2019",

month = apr,

language = "English",

url = "http://www.apcm-europe.eu",

}

TY - CONF

T1 - An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps

AU - Geiger, Bernhard

AU - Schrunner, Stefan

AU - Kern, Roman

N1 - Schrunner und Geiger haben zu gleichen Anteilen zur Publikation beigetragen.

PY - 2019/4

Y1 - 2019/4

M3 - Abstract

T2 - European Advanced Process Control and Manufacturing Conference

Y2 - 8 April 2019 through 10 April 2019

ER -