An Optical Profilometer for Characterizing Complex Surfaces under High Vacuum Conditions

Katrin Fladischer, D Litwin, J Galas, Roland Lammegger, A. Weeks, D MacLaren, Heinrich Sormann, Wolfgang Ernst, Bodil Holst

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)182-185
JournalPrecision engineering
Issue number3
Publication statusPublished - 2008

Fields of Expertise

  • Advanced Materials Science

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