Original language | German |
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Title of host publication | SPIE International Symposium Optical Metrology |
Publisher | . |
Pages | 476-487 |
Publication status | Published - 1991 |
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
- Experimental
Theo Neger, Helmut Jäger, Harald Philipp, Georg Pretzler, Klaus Widmann, Jakob Woisetschläger
Research output: Chapter in Book/Report/Conference proceeding › Conference paper
Original language | German |
---|---|
Title of host publication | SPIE International Symposium Optical Metrology |
Publisher | . |
Pages | 476-487 |
Publication status | Published - 1991 |