Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS

Christoph Pollak, Klaus Reichmann, Herbert Hutter

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	119-124
Journal	Surface and Coatings Technology
Volume	150
Publication status	Published - 2002

Treatment code (Nähere Zuordnung)

@article{a9cf6985171e4e8ba0178306070f6380,

title = "Comparative Study of LNO, LSCO and LSMO as Electrode Layers for Microelectronic Capacitors by Dynamic SIMS",

author = "Christoph Pollak and Klaus Reichmann and Herbert Hutter",

year = "2002",

language = "English",

volume = "150",

pages = "119--124",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}