CVD of polymeric thin films: Applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes

Gozde Ozaydin-Ince*, Anna Maria Coclite, Karen K. Gleason

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review


Polymers with their tunable functionalities offer the ability to rationally design micro- and nano-engineered materials. Their synthesis as thin films have significant advantages due to the reduced amounts of materials used, faster processing times and the ability to modify the surface while preserving the structural properties of the bulk. Furthermore, their low cost, ease of fabrication and the ability to be easily integrated into processing lines, make them attractive alternatives to their inorganic thin film counterparts. Chemical vapor deposition (CVD) as a polymer thin-film deposition technique offers a versatile platform for fabrication of a wide range of polymer thin films preserving all the functionalities. Solventless, vapor-phase deposition enable the integration of polymer thin films or nanostructures into micro- and nanodevices for improved performance. In this review, CVD of functional polymer thin films and the polymerization mechanisms are introduced. The properties of the polymer thin films that determine their behavior are discussed and their technological advances and applications are reviewed.

Original languageEnglish
Article number016501
JournalReports on Progress in Physics
Issue number1
Publication statusPublished - 1 Jan 2012
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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