[DE] FOTOLACK; [EN] PHOTORESIST; [FR] LAQUE PHOTOSENSIBLE

Frank Wiesbrock (Inventor), Franz Stelzer (Inventor), Verena Schenk (Inventor), Lisa Ellmaier (Inventor)

Research output: Patent

Original languageEnglish
Patent numberWO 2013/036979 A1
Publication statusPublished - 21 Mar 2013

Fields of Expertise

  • Advanced Materials Science

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