Deep X-ray Lithography for Material Science

Benedetta Marmiroli; Luca Malfatti; Ludovic F Dumee; Sang Hoon Han; Plinio Innocenzi; Paolo Falcaro; Heinz Amenitsch

Deep X-ray Lithography for Material Science

Benedetta Marmiroli, Luca Malfatti, Ludovic F Dumee, Sang Hoon Han, Plinio Innocenzi, Paolo Falcaro, Heinz Amenitsch

Institute of Inorganic Chemistry (6330)

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2013
Event	Nanotech Italy 2013 - Venezia Duration: 27 Nov 2013 → 29 Nov 2013

Conference

Conference	Nanotech Italy 2013
City	Venezia
Period	27/11/13 → 29/11/13

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Experimental
Review
Application

Cite this

@conference{2b5d33db891142e2833bf3ec2f03138d,

title = "Deep X-ray Lithography for Material Science",

author = "Benedetta Marmiroli and Luca Malfatti and Dumee, {Ludovic F} and Han, {Sang Hoon} and Plinio Innocenzi and Paolo Falcaro and Heinz Amenitsch",

year = "2013",

language = "English",

note = "Nanotech Italy 2013 ; Conference date: 27-11-2013 Through 29-11-2013",

}