Abstract
Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.
Original language | English |
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Pages (from-to) | 1706-1712 |
Number of pages | 7 |
Journal | Nanoscale |
Volume | 14 |
Issue number | 5 |
DOIs | |
Publication status | Published - 7 Feb 2022 |
ASJC Scopus subject areas
- Materials Science(all)
Fields of Expertise
- Advanced Materials Science