Direct-on-barrier copper electroplating on ruthenium from the ionic liquid 1-ethyl-3-methylimidazolium dicyanamide

Lucia D´Urzo, Stijn Schaltin, Andrey Shkurankov, Harald Plank, Gerald Kothleitner, Christian Gspan

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)945-951
JournalJournal of Materials Science
Issue number4
Publication statusPublished - 2012

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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