EDX quantification in the TEM: How to measure ζ-factors without knowing the sample thickness

Nikolaus Rauch, Judith Lammer, Martina Dienstleder, Werner Grogger

Research output: Contribution to conferenceAbstractpeer-review


Within this abstract, we present a new way to determine 휁-factors for EDXS quantification experimentally for both light and heavy elements. With this approach, we eliminate the necessity of knowing the thickness of the reference sample, which is very often a crucial issue during 휁-factor determination.

The correct determination of the element concentration in a material via energy-dispersive X-ray spectrometry (EDXS) stands or falls on the precision of the quantification method. There are two established methods within the TEM community: the conventional Cliff-Lorimer technique [1] and the newer 휁-factor method [2]. The latter provides not only elemental concentrations but also the mass-thickness of the observed specimen area as results. Furthermore, a proper absorption correction for low energy X-rays is implemented, which makes it more accurate for the quantification of light elements. A precondition for using this method is the determination of correct sensitivity factors, the so-called 휁-factors. However, the determination of accurate values for light elements is a complex and challenging task, which is the reason, why the method is unfortunately not as commonly used as suspected regarding its major advantage of a built-in absorption correction.
Original languageEnglish
Publication statusPublished - 2020
EventVirtual Early Career European Microscopy Congress 2020: EMC 2020 - Virtuell, United Kingdom
Duration: 24 Nov 202026 Nov 2020


ConferenceVirtual Early Career European Microscopy Congress 2020
Abbreviated titleEMC 2020
Country/TerritoryUnited Kingdom
Internet address

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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