Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures

Harald Plank, Joo Hyon Noh, Jason Fowlkes, Kevin Lester, Brett B. Lewis, Philip D. Rack

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1018-1024
JournalACS Applied Materials & Interfaces
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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