Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy

Werner Grogger, Ferdinand Hofer, Peter Warbichler, O. Leitner

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Microscopy of semiconducting materials 1999
Place of Publication	Bristol
Publisher	Institute of Physics Publ.
Pages	35-38
Volume	164
ISBN (Print)	0-7503-0650-5
Publication status	Published - 1999
Event	Conference on Microscopy of Semiconducting Materials - Oxford, United Kingdom Duration: 22 Mar 1999 → 25 Mar 1999

Name	Institute of Physics conference series
Publisher	Institute of Physics Publ.

Conference	Conference on Microscopy of Semiconducting Materials
Country/Territory	United Kingdom
City	Oxford
Period	22/03/99 → 25/03/99

Treatment code (Nähere Zuordnung)

Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. / Grogger, Werner ; Hofer, Ferdinand; Warbichler, Peter et al.
Microscopy of semiconducting materials 1999. Vol. 164 Bristol: Institute of Physics Publ., 1999. p. 35-38 (Institute of Physics conference series).

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Grogger, W , Hofer, F, Warbichler, P & Leitner, O 1999, Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. in Microscopy of semiconducting materials 1999. vol. 164, Institute of Physics conference series, Institute of Physics Publ., Bristol, pp. 35-38, Conference on Microscopy of Semiconducting Materials, Oxford, United Kingdom, 22/03/99.

@inproceedings{b8d6c9f850564dc0a40f92f14e859311,

title = "Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy",

author = "Werner Grogger and Ferdinand Hofer and Peter Warbichler and O. Leitner",

year = "1999",

language = "English",

isbn = "0-7503-0650-5",

volume = "164",

series = "Institute of Physics conference series",

publisher = "Institute of Physics Publ.",

pages = "35--38",

booktitle = "Microscopy of semiconducting materials 1999",

note = "Conference on Microscopy of Semiconducting Materials ; Conference date: 22-03-1999 Through 25-03-1999",

}

TY - GEN

T1 - Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy

AU - Grogger, Werner

AU - Hofer, Ferdinand

AU - Warbichler, Peter

AU - Leitner, O.

PY - 1999

Y1 - 1999

M3 - Conference paper

SN - 0-7503-0650-5

VL - 164

T3 - Institute of Physics conference series

SP - 35

EP - 38

BT - Microscopy of semiconducting materials 1999

PB - Institute of Physics Publ.

CY - Bristol

T2 - Conference on Microscopy of Semiconducting Materials

Y2 - 22 March 1999 through 25 March 1999

ER -