Entwicklung und Verbesserung von Kathodenzerstäubungsprozessen zur Abscheidung dielektrischer Schichten auf einen Polymerchip für die Detektion von Biomolekülen durch LFIRE™

The aim of this thesis was the development and improvement of reactive sputtering processes for the coating of polymer slides with dielectric coatings. Due to the high and low index layers on the polymer surface, it is possible to increase the sensitivity of the detection of biomolecules using "label free internal reflection".



Due to the lack of a process control for the sputtering facility used, the diffculty was to find a favourable working point. Therefore, the influence of the sputtering parameters on the refractive index and sputtering rate was investigated using silicon nitride and silicon oxide layers. After selection of appropriate parameters, the cycle time for the four-layer system (Si3N4-ZnS-Si3N4-SiO2) was reduced and the impact on surface geometry and

chemical stability was analysed.



Adequate processes for the materials used were found and, in contrast to the first prototypes, a reduction in cycle time could be established. Despite the insufficient chemical

durability of the coated slides in respect to the decreased cycle time, this assignment provided important insight into special scientific findings in connection with the coating

technology which will be essential to further investigations.