Extreme Ultraviolet Metaoptics enabled by Vacuum Guiding

Marcus Ossiander, Hana K. Hampel, Maryna L. Meretska, Soon Wei D. Lim, Nico Knefz, Thomas Jauk, Martin Schultze, Federico Capasso

Research output: Chapter in Book/Report/Conference proceedingConference paperpeer-review

Abstract

We experimentally demonstrate a dielectric metalens operating at 50 nm wavelength by leveraging that holes in a Silicon membrane guide extreme ultraviolet light. A knife edge measurement shows focusing down to 1.7 times the diffraction limit.

Original languageEnglish
Title of host publication2023 Conference on Lasers and Electro-Optics, CLEO 2023
PublisherInstitute of Electrical and Electronics Engineers
Number of pages5
ISBN (Electronic)9781957171258
Publication statusPublished - Apr 2023
Event2023 Conference on Lasers and Electro-Optics: CLEO 2023 - San Jose, United States
Duration: 7 May 202312 May 2023

Publication series

Name2023 Conference on Lasers and Electro-Optics, CLEO 2023

Conference

Conference2023 Conference on Lasers and Electro-Optics
Country/TerritoryUnited States
CitySan Jose
Period7/05/2312/05/23

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Science Applications
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Fields of Expertise

  • Advanced Materials Science

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