@inproceedings{2fc1618a9f7446d8a24a7a35392e102d,
title = "Extreme Ultraviolet Metaoptics enabled by Vacuum Guiding",
abstract = "We experimentally demonstrate a dielectric metalens operating at 50 nm wavelength by leveraging that holes in a Silicon membrane guide extreme ultraviolet light. A knife edge measurement shows focusing down to 1.7 times the diffraction limit.",
author = "Marcus Ossiander and Hampel, {Hana K.} and Meretska, {Maryna L.} and Lim, {Soon Wei D.} and Nico Knefz and Thomas Jauk and Martin Schultze and Federico Capasso",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023 {\textcopyright} 2023 The Author(s); 2023 Conference on Lasers and Electro-Optics : CLEO 2023 ; Conference date: 07-05-2023 Through 12-05-2023",
year = "2023",
month = apr,
language = "English",
series = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",
publisher = "Institute of Electrical and Electronics Engineers",
booktitle = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",
address = "United States",
}