Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors: Implications for Nanoelectronic Gates, Interconnects, and Spintronics

Felix Jungwirth, Fabrizio Porrati, Daniel Knez, Masiar Sistani, Harald Plank, Michael Huth, Sven Barth^*

^*Corresponding author for this work

Institute of Electron Microscopy and Nanoanalysis (5190)

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CD-Laboratory for Direct-Write Fabrication of 3D Nano-Probes
Plank, H., Kuhness, D., Sattelkow, J., Seewald, L., Brugger-Hatzl, M. & Winkler, R.
1/03/18 → 28/02/25
Project: Research project