Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction

Research output: Contribution to journal › Article › peer-review

Fields of Expertise

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → 31/12/23
Project: Research project

@article{eb8c91ece6b94d26a0393b8e39164a36,

title = "Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction",

author = "Harald Plank",

year = "2015",

doi = "10.1088/0957-4484/26/5/050501",

language = "English",

volume = "26",

pages = "050501--pp4",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

}