Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Georg Arnold, Rajendra Timislina, Jason Fowlkes, Angelina Orthacker, Gerald Kothleitner, Philip D. Rack, Harald Plank*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


In this study, we focus on the resolution limits for quasi 2-D single lines synthesized via focused electron-beam-induced direct-write deposition at 5 and 30 keV in a scanning electron microscope. To understand the relevant proximal broadening effects, the substrates were thicker than the beam penetration depth and we used the MeCpPt(IV)Me3 precursor under standard gas injection system conditions. It is shown by experiment and simulation how backscatter electron yields increase during the initial growth stages which broaden the single lines consistent with the backscatter range of the deposited material. By this it is shown that the beam diameter together with the evolving backscatter radius of the deposit material determines the achievable line widths even for ultrathin deposit heights in the sub-5-nm regime
Original languageEnglish
Pages (from-to)7380-7387
JournalACS Applied Materials & Interfaces
Issue number10
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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