Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

Georg Arnold, Roland Schmied, R. Timilsina, J.D. Fowlkes, Angelina Orthacker, Gerald Kothleitner, P.D. Rack, Harald Plank

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 22 Jul 2014
EventFEBIP 2014 - Frankfurt, Germany
Duration: 22 Jul 2014 → …


ConferenceFEBIP 2014
Period22/07/14 → …

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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