TY - JOUR
T1 - Hafnia sol-gel films synthesized from HfCl4
T2 - Changes of structure and properties with the firing temperature
AU - Kidchob, Tongjit
AU - Malfatti, Luca
AU - Serra, Filomena
AU - Falcaro, Paolo
AU - Enzo, Stefano
AU - Innocenzi, Plinio
PY - 2007/4
Y1 - 2007/4
N2 - Thin sol-gel hafnia films have been synthesised from HfCl4, the synthesis has revealed to be a simple route to fabrication of hafnia films with high transparency in the UV-visible range. The films have been fired at different temperatures in air up to 1000°C and have been characterized by X-ray diffraction and Fourier transform infrared spectroscopy. Infrared absorption spectra of hafnia films have allowed to follow the formation of monoclinic crystalline phases together with XRD. Formation of monoclinic hafnia crystallites has been observed upon calcination at temperatures higher than 600°C, as shown by infrared spectroscopy and XRD. The optical transmission and the refractive index as a function of the temperature of firing have been characterized by UV-Visible spectroscopy and spectroscopic ellipsometry. The hafnia films, after firing at 600°C, had a refractive index of 1.92 with a thickness of around 70 nm.
AB - Thin sol-gel hafnia films have been synthesised from HfCl4, the synthesis has revealed to be a simple route to fabrication of hafnia films with high transparency in the UV-visible range. The films have been fired at different temperatures in air up to 1000°C and have been characterized by X-ray diffraction and Fourier transform infrared spectroscopy. Infrared absorption spectra of hafnia films have allowed to follow the formation of monoclinic crystalline phases together with XRD. Formation of monoclinic hafnia crystallites has been observed upon calcination at temperatures higher than 600°C, as shown by infrared spectroscopy and XRD. The optical transmission and the refractive index as a function of the temperature of firing have been characterized by UV-Visible spectroscopy and spectroscopic ellipsometry. The hafnia films, after firing at 600°C, had a refractive index of 1.92 with a thickness of around 70 nm.
KW - Films
KW - Hafnia
KW - Infrared spectroscopy
KW - XRD
UR - http://www.scopus.com/inward/record.url?scp=33847236990&partnerID=8YFLogxK
U2 - 10.1007/s10971-006-1511-9
DO - 10.1007/s10971-006-1511-9
M3 - Article
AN - SCOPUS:33847236990
SN - 0928-0707
VL - 42
SP - 89
EP - 93
JO - Journal of Sol-Gel Science and Technology
JF - Journal of Sol-Gel Science and Technology
IS - 1
ER -