Hydrogen sulphide detection by CMOS integrated tungsten oxide nanowire networks

Johanna Krainer, Marco Deluca, Eva Lackner, Robert Wimmer-Teubenbacher, Florentyna Sosada, Christian Gspan, Karl Rohracher, Ewald Wachmann, Anton Köck

Research output: Contribution to journalConference article


Metal oxide nanostructures like tungsten oxide nanowires are intensively studied materials for sensor applications. In this work we report on tungsten oxide gas sensors integrated on a CMOS fabricated microhotplate chip. Tungsten oxide gas sensors were prepared by drop coating of a nanowire network suspension onto interdigitated electrodes prefabricated on the CMOS microhotplate chip. The tungsten oxide nanowire network was characterised by TEM and Raman spectroscopy, confirming their non-stoichiometric state. Using tungsten oxide nanowire networks as gas sensing material we observed high sensitivity to hydrogen sulphide: concentrations of 1 ppm have been detected with a sensor response up to 55%.
Original languageEnglish
Pages (from-to)7132-7136
JournalMaterials Today: Proceedings
Issue number7,2
Publication statusPublished - 2017

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application

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